Observing the microstructure of a (001) κ-Ga₂O₃ thin film grown on a (−201) β-Ga₂O₃ substrate using automated crystal orientation mapping transmission electron microscopy

Towards 3D crystal orientation reconstruction using automated crystal orientation mapping transmission electron microscopy (ACOM-TEM)

To relate the internal structure of a volume (crystallite and phase boundaries) to properties (electrical, magnetic, mechanical, thermal), a full 3D reconstruction in combination with in situ testing is desirable. In situ testing allows the crystallographic changes in a material to be followed by tracking and comparing the individual crystals and phases. Standard transmission electron microscop...

Crosshatching on a SiGe film grown on a Si„001... substrate studied by Raman mapping and atomic force microscopy

The morphology, stress, and composition distributions of the crosshatch pattern on a SiGe film grown on a Si~001! substrate using a low-temperature Si buffer are studied by atomic force and Raman microscopies. Crosshatching is not related to composition fluctuation regardless of the stress undulation associated with strain relaxation in the SiGe film. The crosshatch morphology arises from verti...

Thin dielectric film thickness determination by advanced transmission electron microscopy.

High-resolution transmission electron microscopy (HR-TEM) has been used as the ultimate method of thickness measurement for thin films. The appearance of phase contrast interference patterns in HR-TEM images has long been confused as the appearance of a crystal lattice by nonspecialists. Relatively easy to interpret crystal lattice images are now directly observed with the introduction of annul...

Transmission Electron Microscopy Investigations of Thin Mo and Pd Films Grown on SrTiO 3 Substrates

Microcleavage transmission electron microscopy applied to the interfacial structure of multUayers and microstructure of smaU particles on a substrate

The preparation, characterization, and study of small struct ures are problems of major current activity. 1,2 Many of the physical properties of microstructures such as small particles, muItilayers, or supedattices are strongly connected to their morphology. Structural characterization is mostly accomplished with the use of diffraction (x ray, neutron or electron) and imaging [transmission (TEM...